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1

Effect of Remote Oxygen Scavenging on Electrical Properties of Ge-Based Metal–Oxide–Semiconductor Capacitors

Fadida, Sivan, Nyns, Laura, Van Elshocht, Sven, Eizenberg, Moshe

Journal:

Journal of Electronic Materials

Year:

2017

Language:

english

File:

PDF, 1004 KB

english, 2017

2

Observation and characterization of defects in HfO2 high-K gate dielectric layers

Vidya Kaushik, Martine Claes, Annelies Delabie, Sven Van Elshocht, Olivier Richard, Thierry Conard, Erika Rohr, Thomas Witters, Matty Caymax, Stefan De Gendt, Marc Heyns

Journal:

Microelectronics Reliability

Year:

2005

Language:

english

File:

PDF, 538 KB

english, 2005

3

Low-k a-SiCO:H films as diffusion barriers for advanced interconnects

Van Besien, Els, Singh, Arjun, Barbarin, Yohan, Verdonck, Patrick, Dekkers, Harold F.W., Vanstreels, Kris, de Marneffe, Jean-François, Baklanov, Mikhail R., Van Elshocht, Sven

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 488 KB

english, 2014

4

Mechanisms for the Trimethylaluminum Reaction in Aluminum Oxide Atomic Layer Deposition on Sulfur Passivated Germanium

Delabie, Annelies, Sioncke, Sonja, Rip, Jens, Van Elshocht, Sven, Caymax, Matty, Pourtois, Geoffrey, Pierloot, Kristine

Journal:

The Journal of Physical Chemistry C

Year:

2011

Language:

english

File:

PDF, 4.57 MB

english, 2011

5

The Impact of Stacked Cap Layers on Effective Work Function With HfSiON and SiON Gate Dielectrics

Cho, Hag-Ju, Yu, Hong Yu, Chang, Vincent S., Akheyar, Amal, Jakschik, Stefan, Conard, Thierry, Hantschel, Thomas, Delabie, Annelies, Adelmann, Christoph, Van Elshocht, Sven, Ragnarsson, Lars-Åke, Schr

Journal:

IEEE Electron Device Letters

Year:

2008

Language:

english

File:

PDF, 345 KB

english, 2008

6

Impact of thermal treatment upon morphology and crystallinity of strontium titanate films deposited by atomic layer deposition

Popovici, Mihaela, Van Elshocht, Sven, Menou, Nicolas, Favia, Paola, Bender, Hugo, Rosseel, Erik, Swerts, Johan, Adelmann, Christoph, Vrancken, Christa, Moussa, Alain, Tielens, Hilde, Tomida, Kazuyuki

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2011

Language:

english

File:

PDF, 922 KB

english, 2011

7

Phase Formation and Morphology of Nickel Silicide Thin Films Synthesized by Catalyzed Chemical Vapor Reaction of Nickel with Silane

Peter, Antony Premkumar, Meersschaut, Johan, Richard, Olivier, Moussa, Alain, Steenbergen, Johnny, Schaekers, Marc, Tőkei, Zsolt, Van Elshocht, Sven, Adelmann, Christoph

Journal:

Chemistry of Materials

Year:

2015

Language:

english

File:

PDF, 3.15 MB

english, 2015

8

Ozone Based Atomic Layer Deposition of Hafnium Oxide and Impact of Nitrogen Oxide Species

Delabie, Annelies, Swerts, Johan, Elshocht, Sven Van, Jung, Sung-Hoon, Raisanen, Petri I., Givens, Michael E., Shero, Eric J., Peeters, Jozef, Machkaoutsan, Vladimir, Maes, Jan Willem

Journal:

Journal of The Electrochemical Society

Year:

2011

Language:

english

File:

PDF, 1.14 MB

english, 2011

9

Scaling to Sub-1 nm Equivalent Oxide Thickness with Hafnium Oxide Deposited by Atomic Layer Deposition

Delabie, Annelies, Caymax, Matty, Brijs, Bert, Brunco, David P., Conard, Thierry, Sleeckx, Erik, Van Elshocht, Sven, Ragnarsson, Lars-Åke, De Gendt, Stefan, Heyns, Marc M.

Journal:

Journal of The Electrochemical Society

Year:

2006

Language:

english

File:

PDF, 625 KB

english, 2006

10

Growth and Material Characterization of Hafnium Titanates Deposited by Atomic Layer Deposition

Popovici, Mihaela, Delabie, Annelies, Van Elshocht, Sven, Clima, Sergiu, Pourtois, Geoffrey, Nyns, Laura, Tomida, Kazuyuki, Menou, Nicolas, Opsomer, Karl, Swerts, Johan, Detavernier, Christophe, Woute

Journal:

Journal of The Electrochemical Society

Year:

2009

Language:

english

File:

PDF, 351 KB

english, 2009

11

Characterization of Porous Structures in Advanced Low- k Films with Thin TaN Layers Using Monoenergetic Positron Beams

Uedono, Akira, Verdonck, Patrick, Delabie, Annelies, Swerts, Johan, Witters, Thomas, Conard, Thierry, Baklanov, Mikhail R., Elshocht, Sven Van, Oshima, Nagayasu, Suzuki, Ryoichi

Journal:

Japanese Journal of Applied Physics

Year:

2013

Language:

english

File:

PDF, 90 KB

english, 2013

12

Thickness dependence of the resistivity of platinum-group metal thin films

Dutta, Shibesh, Sankaran, Kiroubanand, Moors, Kristof, Pourtois, Geoffrey, Van Elshocht, Sven, Bömmels, Jürgen, Vandervorst, Wilfried, Tőkei, Zsolt, Adelmann, Christoph

Journal:

Journal of Applied Physics

Year:

2017

Language:

english

File:

PDF, 2.08 MB

english, 2017

13

Microwave Characterization of Ba-substituted PZT and ZnO Thin Films

Tierno, Davide, Dekkers, Matthijn, Wittendorp, Paul, Sun, Xiao, Bayer, Samuel C., King, Seth T., Van Elshocht, Sven, Heyns, Marc, Radu, Iuliana P., Adelmann, Christoph

Journal:

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Year:

2018

Language:

english

File:

PDF, 1.12 MB

english, 2018

14

Improved EOT and leakage current for metal–insulator–metal capacitor stacks with rutile TiO2

Mihaela Popovici, Min-Soo Kim, Kazuyuki Tomida, Johan Swerts, Hilde Tielens, Alain Moussa, Olivier Richard, Hugo Bender, Alexis Franquet, Thierry Conard, Laith Altimime, Sven Van Elshocht, Jorge A. Ki

Journal:

Microelectronic Engineering

Year:

2011

Language:

english

File:

PDF, 593 KB

english, 2011

15

Advanced PBTI reliability with 0.69 nm EOT GdHfO gate dielectric

Moonju Cho, Marc Aoulaiche, Robin Degraeve, Ben Kaczer, Thomas Kauerauf, Lars-Åke Ragnarsson, Christoph Adelmann, Sven Van Elshocht, Thomas Y. Hoffmann, Guido Groeseneken

Journal:

Solid-State Electronics

Year:

2011

Language:

english

File:

PDF, 389 KB

english, 2011

16

Chirality in surface nonlinear optics

Martti Kauranen, Thierry Verbiest, Sven van Elshocht, André Persoons

Journal:

Optical Materials

Year:

1998

Language:

english

File:

PDF, 824 KB

english, 1998

17

Chiral 1,1′-binaphthyl-based helical polymers as nonlinear optical materials

Sven Van Elshocht, Thierry Verbiest, Martti Kauranen, Liang Ma, Hua Cheng, Kwon Y Musick, Lin Pu, André Persoons

Journal:

Chemical Physics Letters

Year:

1999

Language:

english

File:

PDF, 155 KB

english, 1999

18

Bacteriorhodopsin: a natural, efficient (nonlinear) photonic crystal

Clays, Koen, Van Elshocht, Sven, Chi, Mingjun, Lepoudre, Erwin, Persoons, André

Journal:

Journal of the Optical Society of America B

Year:

2001

Language:

english

File:

PDF, 303 KB

english, 2001

19

Bacteriorhodopsin: a natural (nonlinear) photonic bandgap material

Clays, Koen, Van Elshocht, Sven, Persoons, André

Journal:

Year:

2000

Language:

english

File:

PDF, 69 KB

english, 2000

20

Second-Order Nonlinear Optics Based on Chiral Materials

Verbiest, Thierry, Persoons, André, Nuckolls, Colin, Katz, Thomas J., Kauranen, Martti, Busson, Bertrand, Van Elshocht, Sven

Journal:

Optics and Photonics News

Year:

2000

Language:

english

File:

PDF, 371 KB

english, 2000

21

Impact of Precursor Chemistry and Process Conditions on the Scalability of ALD HfO[sub 2] Gate Dielectrics

Swerts, Johan, Peys, Nick, Nyns, Laura, Delabie, Annelies, Franquet, Alexis, Maes, Jan Willem, Van Elshocht, Sven, De Gendt, Stefan

Journal:

Journal of The Electrochemical Society

Year:

2010

Language:

english

File:

PDF, 189 KB

english, 2010

22

Selective chemical vapor synthesis of Cu3Ge: Process optimization and film properties

Antony Premkumar Peter, Laureen Carbonell, Marc Schaekers, Christoph Adelmann, Johan Meersschaut, Alexis Franquet, Olivier Richard, Hugo Bender, Tokei Zsolt, Sven van Elshocht

Journal:

Year:

2013

Language:

english

File:

PDF, 1.55 MB

english, 2013

23

Synthesis of large area carbon nanosheets for energy storage applications

Cott, Daire J., Verheijen, Maarten, Richard, Olivier, Radu, Iuliana, Gendt, Stefan De, Elshocht, Sven van, Vereecken, Philippe M.

Journal:

Year:

2013

Language:

english

File:

PDF, 1.03 MB

english, 2013

24

Synthesis, Self-Assembly, and Nonlinear Optical Properties of Conjugated Helical Metal Phthalocyanine Derivatives

Fox, Joseph M., Katz, Thomas J., Van Elshocht, Sven, Verbiest, Thierry, Kauranen, Martti, Persoons, André, Thongpanchang, Tienthong, Krauss, Todd, Brus, Louis

Journal:

Journal of the American Chemical Society

Year:

1999

Language:

english

File:

PDF, 159 KB

english, 1999

25

Fuzzy Assembly and Second Harmonic Generation of Clay/Polymer/Dye Monolayer Films

van Duffel, Bart, Verbiest, Thierry, Van Elshocht, Sven, Persoons, André, De Schryver, Frans C., Schoonheydt, Robert A.

Journal:

Year:

2001

Language:

english

File:

PDF, 517 KB

english, 2001

26

Tensor analysis of the second-order nonlinear optical susceptibility of chiral anisotropic thin films

Kauranen, Martti, Van Elshocht, Sven, Verbiest, Thierry, Persoons, André

Journal:

The Journal of Chemical Physics

Year:

2000

Language:

english

File:

PDF, 366 KB

english, 2000

27

Atomic layer deposition of high- k dielectrics on single-walled carbon nanotubes: a Raman study

Liyanage, Luckshitha Suriyasena, Cott, Daire J, Delabie, Annelies, Elshocht, Sven Van, Bao, Zhenan, Philip Wong, H-S

Journal:

Year:

2013

Language:

english

File:

PDF, 2.48 MB

english, 2013

28

Circular Dichroism and UV−Visible Absorption Spectra of the Langmuir−Blodgett Films of an Aggregating Helicene

Nuckolls, Colin, Katz, Thomas J., Verbiest, Thierry, Elshocht, Sven Van, Kuball, Hans-Georg, Kiesewalter, Stefan, Lovinger, Andrew J., Persoons, André

Journal:

Journal of the American Chemical Society

Year:

1998

Language:

english

File:

PDF, 89 KB

english, 1998

29

Ultrathin NiGe Films Prepared via Catalytic Solid–Vapor Reaction of Ni with GeH 4

Peter, Antony P., Opsomer, Karl, Adelmann, Christoph, Schaekers, Marc, Meersschaut, Johan, Richard, Olivier, Vaesen, Inge, Moussa, Alain, Franquet, Alexis, Zsolt, Tokei, Van Elshocht, Sven

Journal:

ACS Applied Materials & Interfaces

Year:

2013

Language:

english

File:

PDF, 2.26 MB

english, 2013

30

Liquid Injection MOCVD of Dysprosium Scandate Films

Thomas, Reji, Ehrhart, Peter, Roeckerath, Martin, van Elshocht, Sven, Rije, Eduard, Luysberg, Martina, Boese, Markus, Schubert, Juergen, Caymax, Matty, Waser, Rainer

Journal:

Journal of The Electrochemical Society

Year:

2007

Language:

english

File:

PDF, 1.22 MB

english, 2007

31

Hf-based high-k dielectrics for p-Ge MOS gate stacks

Fadida, Sivan, Palumbo, Felix, Nyns, Laura, Lin, Dennis, Van Elshocht, Sven, Caymax, Matty, Eizenberg, Moshe

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2014

Language:

english

File:

PDF, 1.89 MB

english, 2014

32

Scalability of RuTiN barriers deposited by plasma-enhanced atomic layer deposition for advanced interconnects

Swerts, Johan, Siew, Yong-Kong, Van Besien, Els, Barbarin, Yohan, Opsomer, Karl, Bömmels, Jürgen, Tőkei, Zsolt, Van Elshocht, Sven

Journal:

Microelectronic Engineering

Year:

2014

Language:

english

File:

PDF, 1.02 MB

english, 2014

33

Reaction Chemistry during the Atomic Layer Deposition of Sc 2 O 3 and Gd 2 O 3 from Sc(MeCp) 3 , Gd( i PrCp) 3 , and H 2 O

Han, Jeong Hwan, Nyns, Laura, Delabie, Annelies, Franquet, Alexis, Van Elshocht, Sven, Adelmann, Christoph

Journal:

Chemistry of Materials

Year:

2014

Language:

english

File:

PDF, 1.49 MB

english, 2014

34

Comparison of linearly and circularly polarized probes of second-order optical activity of chiral surfaces

Maki, Jeffery J., Verbiest, Thierry, Kauranen, Martti, Elshocht, Sven Van, Persoons, André

Journal:

The Journal of Chemical Physics

Year:

1996

Language:

english

File:

PDF, 373 KB

english, 1996

35

[IEEE 2014 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) - San Hose, CA, USA (2014.5.20-2014.5.23)] IEEE International Interconnect Technology Conference - Alternative metals for advanced interconnects

Adelmann, Christoph, Wen, Liang Gong, Peter, Antony Premkumar, Siew, Yong Kong, Croes, Kristof, Swerts, Johan, Popovici, Mihaela, Sankaran, Kiroubanand, Pourtois, Geoffrey, Van Elshocht, Sven, Bommels

Year:

2014

Language:

english

File:

PDF, 610 KB

english, 2014

36

[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Alternative Gate Dielectric Materials

Van Elshocht, Sven, Hardy, An, De Gendt, S., Adelmann, Christophe, Baumann, Peter K., Brunco, David P., Caymax, Matty R., Conard, Thierry, Delugas, Pietro, Lehnen, Peer, Richard, Olivier, Rohr, Erika,

Year:

2006

Language:

english

File:

PDF, 260 KB

english, 2006

37

Influence of carbon content on the copper-telluride phase formation and on the resistive switching behavior of carbon alloyed Cu-Te conductive bridge random access memory cells

Devulder, Wouter, Opsomer, Karl, Franquet, Alexis, Meersschaut, Johan, Belmonte, Attilio, Muller, Robert, De Schutter, Bob, Van Elshocht, Sven, Jurczak, Malgorzata, Goux, Ludovic, Detavernier, Christo

Journal:

Journal of Applied Physics

Year:

2014

Language:

english

File:

PDF, 1.66 MB

english, 2014

38

ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - ALD Barrier Deposition on Porous Low-k Dielectric Materials for Interconnects

Van Elshocht, Sven, Delabie, Annelies, Dewilde, Sven, Meersschaut, Johan, Swerts, Johan, Tielens, Hilde, Verdonck, Patrick, Witters, Thomas, Vancoille, Eric

Year:

2011

Language:

english

File:

PDF, 78 KB

english, 2011

39

Second-Order Nonlinear Optical Properties of Highly Symmetric Chiral Thin Films

Verbiest, Thierry, Elshocht, Sven Van, Persoons, André, Nuckolls, Colin, Phillips, Karen E., Katz, Thomas J.

Journal:

Year:

2001

Language:

english

File:

PDF, 48 KB

english, 2001

40

Crystallization resistance of barium titanate zirconate ultrathin films from aqueous CSD: a study of cause and effect

Hardy, An, Van Elshocht, Sven, Knaepen, Werner, D'Haen, Jan, Conard, Thierry, Brijs, Bert, Vandervorst, Wilfred, Pourtois, Geoffrey, Kittl, Jorge, Detavernier, Christophe, Heyns, Marc, Van Bael, Marli

Journal:

Journal of Materials Chemistry

Year:

2009

Language:

english

File:

PDF, 916 KB

english, 2009

41

Growth evolution and characterization of ultra-thin CoGe2 films synthesized via a catalytic solid–vapour reaction technique

Peter, Antony Premkumar, Opsomer, Karl, Adelmann, Christoph, van Ammel, Annemie, Meersschaut, Johan, Moussa, Alain, Schaekers, Marc, Wen, Liang Gong, Zsolt, Tokei, Van Elshocht, Sven

Journal:

Journal of Materials Chemistry C

Year:

2014

Language:

english

File:

PDF, 3.30 MB

english, 2014

42

[IEEE 2010 IEEE International Memory Workshop - Seoul, Korea (South) (2010.05.16-2010.05.19)] 2010 IEEE International Memory Workshop - Exploration of rare earth materials for future interpoly dielectric replacement in Flash memory devices

Wellekens, Dirk, Van Elshocht, Sven, Adelmann, Christoph, Meersschaut, Johan, Swerts, Johan, Kittl, Jorge, Cacciato, Antonio, Debusschere, Ingrid, Jurczak, Malgorzata, Van Houdt, Jan

Year:

2010

Language:

english

File:

PDF, 520 KB

english, 2010

43

Atomic layer deposition of tantalum oxide and tantalum silicate from TaCl5, SiCl4, and O3: growth behaviour and film characteristics

Han, Jeong Hwan, Ungur, Elisaveta, Franquet, Alexis, Opsomer, Karl, Conard, Thierry, Moussa, Alain, De Gendt, Stefan, Van Elshocht, Sven, Adelmann, Christoph

Journal:

Journal of Materials Chemistry C

Year:

2013

Language:

english

File:

PDF, 757 KB

english, 2013

44

[IEEE 2008 IEEE International Reliability Physics Symposium (IRPS) - Phoenix, AZ, USA (2008.04.27-2008.05.1)] 2008 IEEE International Reliability Physics Symposium - Anomalous positive-bias temperature instability of high-κ/metal gate nMOSFET devices with Dy2O3 capping

O'Connor, Robert, Chang, Vincent S., Pantisano, Luigi, Ragnarsson, Lars-Ake, Aoulaiche, Marc, O'Sullivan, Barry, Adelmann, Christoph, Van Elshocht, Sven, Lehnen, Peer, HongYu Yu,, Groeseneken, Guido

Year:

2008

Language:

english

File:

PDF, 858 KB

english, 2008

45

Direct evidence of the failure of electric-dipole approximation in second-harmonic generation from a chiral polymer film

Van Elshocht, Sven, Verbiest, Thierry, Kauranen, Martti, Persoons, André, Langeveld-Voss, B. M. W., Meijer, E. W.

Journal:

The Journal of Chemical Physics

Year:

1997

Language:

english

File:

PDF, 345 KB

english, 1997

46

[IEEE 2013 IEEE International Interconnect Technology Conference - IITC - Kyoto, Japan (2013.06.13-2013.06.15)] 2013 IEEE International Interconnect Technology Conference - IITC - Development and evaluation of a-SiC:H films using a dimethylsilacyclopentane precursor as a low-k Cu capping layer

Van Besien, Els, Wang, Cong, Verdonck, Patrick, Singh, Arjun, Barbarin, Yohan, de Marneffe, Jean-Francois, Vanstreels, Kris, Tielens, Hilde, Schaekers, Marc, Baklanov, Mikhail R., Van Elshocht, Sven

Year:

2013

Language:

english

File:

PDF, 418 KB

english, 2013

47

ECS Transactions [ECS China Semiconductor Technology International Conference 2010 (CSTIC 2010) - Shanghai, China (March 18 - March 19, 2010)] - On the Process and Material Sensitivities for High-k Based Dielectrics

Van Elshocht, Sven, Adelmann, Christoph, Popovici, Mihaela, Swerts, Johan, Delabie, Annelies, Nyns, Laura, Shi, Xiaoping, Tielens, Hilde, Pourtois, Geoffrey, Menou, Nicolas, Breuil, Laurent, Pierreux,

Year:

2010

Language:

english

File:

PDF, 257 KB

english, 2010

48

[ECS 213th ECS Meeting - Phoenix, AZ (May 18 - May 23, 2008)] ECS Transactions - Replacing SiO2 - Material and Processing Aspects of New Dielectrics

De Gendt, Stefan, Adelmann, Christoph, Delabie, Annelies, Nyns, Laura, Pourtois, Geoffrey, Van Elshocht, Sven

Year:

2008

Language:

english

File:

PDF, 896 KB

english, 2008

49

Reaction mechanisms for atomic layer deposition of aluminum oxide on semiconductor substrates

Delabie, Annelies, Sioncke, Sonja, Rip, Jens, Van Elshocht, Sven, Pourtois, Geoffrey, Mueller, Matthias, Beckhoff, Burkhard, Pierloot, Kristine

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2012

Language:

english

File:

PDF, 1.57 MB

english, 2012

50

Dysprosium scandate thin films as an alternate amorphous gate oxide prepared by metal-organic chemical vapor deposition

Thomas, Reji, Ehrhart, Peter, Luysberg, Martina, Boese, Markus, Waser, Rainer, Roeckerath, Martin, Rije, Eduard, Schubert, Juergen, Van Elshocht, Sven, Caymax, Matty

Journal:

Applied Physics Letters

Year:

2006

Language:

english

File:

PDF, 708 KB

english, 2006